OXIDE Deep-UV QCW 266nm Lasers

OXIDE Deep-UV QCW 266nm Lasers

Keywords: OXIDE, Deep-UV, 266nm, QCW Lasers
Mar 27, 2025 View: 41 Data Sheet

OXIDE’s QCW 266nm laser has been developed for customers who pursue higher output power than CW lasers. Because of the low peak power pulses at 100MHz, damages to optics are minimized.

OXIDE Deep-UV Quasi-CW 266nm Lasers

OXIDE’s QCW 266nm laser has been developed for customers who pursue higher output power than is available with conventional CW (continuous wave) lasers. Because of the low peak power pulses realized by its high repetition rate at 100MHz, users can minimize the damages of optics and samples that can be as low as those caused by continuous wave lasers. This is a novel and highly reliable 266nm high power laser that is realized based on the more than 20 years of history of high performance nonlinear optical crystals and of accumulated expertise of reducing the deep ultraviolet (DUV) damages in CW single frequency lasers.

Sintec Optronics is OXIDE’s appointed distributor.

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Features

  • Ultra-high purity BBO crystal:

    • The outstanding quality of OXIDE’s proprietary BBO crystals has enabled the system to operate for more than 5,000 hours at an average power of 3W. The low degradation of the crystals guarantees high beam quality and stable operation over a long period of time.

  • High-reliability fiber optical amplification technology:

    • Using OXIDE’s proprietary elemental technologies, a stable high-power infrared light source and two-step wavelength conversion of the laser source resulted in this stable 266nm laser.

  • Low power consumption:

    • The highly efficient wavelength conversion laser system realized extremely low power consumption – less than 450W.

Applications

  • Semiconductor inspection, photolithography equipment

  • Raman spectroscopy

  • Photoluminescence

  • Nano laser fabrication

Specification

Value

Wavelength

266nm

Output Power

6.0 (prototype available!), 3.0, 2.0, 1.0W

Linewidth

<0.1nm

Extinction Ratio

>100:1

Beam Quality

M2 < 1.2

Polarization

Horizontal, Linear

Power Supply

AC   100-240V, 50/60Hz

Power Consumption

<450W

Cooling

Water

Dimensions (Head)

290 x 780 x 494mm


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